Wednesday, October 26, 2016
Thursday, September 29, 2016
Thursday, August 13, 2015
Porous Ceramic End Effector for Wafer handling
Porous Ceramic End Effector for Wafer handling
Ceramic End Effector with porous ceramic built in suitable for handling warped wafer or thin wafer that cannot be held properly with the standard vacuum suction type end-effector. Thinned wafer delivers a major problem for normal end effectors because the unsupported area of a wafer is usually deformed at the open vacuum area.
High purity alumina ceramic sintered body is used for the main body of end-effector, and porous ceramic is used for the wafer suction surface.
Porous end-effector can hold thin wafer without deformation.
Conductive Teflon coating is available for suction surface.
SPECS
Custom size and custom design available .
Ceramic End Effector with porous ceramic built in suitable for handling warped wafer or thin wafer that cannot be held properly with the standard vacuum suction type end-effector. Thinned wafer delivers a major problem for normal end effectors because the unsupported area of a wafer is usually deformed at the open vacuum area.
High purity alumina ceramic sintered body is used for the main body of end-effector, and porous ceramic is used for the wafer suction surface.
Porous end-effector can hold thin wafer without deformation.
Conductive Teflon coating is available for suction surface.
SPECS
| Material | Alumina ceramic or SiC |
|---|---|
| Material of Suction Surface | Porous ceramic |
| Wafer Holding Method | Vacuum suction |
| Thickness | 2-4mm |
| Particle Size of Mesh | 40 to 60µm |
| Pore Size | 20µm,30µm,40µm |
Tuesday, September 24, 2013
Ceramic End Effector
In robotics, an end-effector is a device or toll connected to the end of a robot arm. The structure of an end effector (see figure on the left and right), and the nature of the programming and hardware that drives it, depends on the intended task.
A robot arm can accommodate only certain end-effector task modes without changes to the ancillary hardware and/or programming. It is not possible to directly replace a gripper with a screwdriver head, for example, and expect a favorable result. It is necessary to change the programming of the robot controller and use a different set of end-effector motors to facilitate torque rather than gripping force. Then the gripper can be replaced with a driver head.
Whatever you may choose to call them...Robotic Blades, Robotic Hands, Blades, Spatulas, End of Arm Tooling (EOAT), Robotic Arm Tool, or End-Effectors, providing the interface between intelligent robots and the products being handled is the role played by End-Effectors.The technology of capture, hold and move at first glance seem trivial. However, when dealing with sensitive products, low contamination levels, high speed operations and harsh environments, the problems become formidable.
- Standard paddle and fork designs
- For 4", 5", 6", 8" and 12" wafers
- Vacuum and non-vacuum
- High temperature resistance
- Chemical resistance
- Durable and reliable
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